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File:DRAM self-aligned storage node locations.png

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Summary

Description
English: For a given set of bit lines and word lines, the storage node locations (purple circles) can be self-aligned to the bit line contact locations (green).[1][2]
Date
Source Own work
Author Guiding light

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Reference

  1. ↑ J. Park et al., "20nm DRAM: A new beginning of another revolution," IEDM 2015.
  2. ↑ Y-S. Kang et al., J. Micro/Nanolith. MEMS MOEMS 15, 021403 (2016).

Captions

For a given set of bit lines and word lines, the storage node locations can be self-aligned to the bit line contact locations

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inception

20 February 2021

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image/png

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Date/TimeDimensionsUserComment
current09:01, 26 February 2021706 × 550 (52 KB)Guiding lightBLC shape changes

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