File:Sub-0.5 k1 brick pattern.png

Sub-0.5_k1_brick_pattern.png(372 × 267 pixels, file size: 29 KB, MIME type: image/png)

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Summary

Description
English: For features less than 0.5 wavelength/NA, when the pitch is on the order of wavelength/NA, rectangular bricks become distorted into ovals. This is a fundamental outcome of diffraction.[1]
Date
Source Own work
Author Guiding light

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References

  1. 1D vs. 2D Patterning Limits in Advanced Lithography

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29 August 2021

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29,330 byte

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372 pixel

ceeca6f1dd7c50e735346351a7c8058f50eba3f2

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current05:11, 29 August 2021372 × 267 (29 KB)Guiding lightUploaded own work with UploadWizard

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